High quality Ti-implanted Si layers above solid solubility limit

  1. Olea, J.
  2. Pastor, D.
  3. Toledano-Luque, M.
  4. San-Andrés, E.
  5. Mártil, I.
  6. González-Díaz, G.
Aktak:
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09

ISBN: 9781424428397

Argitalpen urtea: 2009

Orrialdeak: 38-41

Mota: Biltzar ekarpena

DOI: 10.1109/SCED.2009.4800424 GOOGLE SCHOLAR
Datuen iturria: Scopus