Electrical characterization of Si+ and Si+/P+ implanted N+P In0.53Ga0.47As junctions

  1. Blanco, M.N.
  2. Redondo, E.
  3. León, C.
  4. Santamaria, J.
  5. González-Diaz, G.
Revue:
Journal of Materials Science: Materials in Electronics

ISSN: 0957-4522

Année de publication: 1999

Volumen: 10

Número: 5

Pages: 425-428

Type: Article

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La source de données: Scopus