Electrical characterization of ECR enhaced deposited silicon nitride bilayers for high quality Al/SiNx/InP MIS structure fabrication

1. Dueñas, S.
2. Peláez, R.
3. Castán, E.
4. Pinacho, R.
5. Quintanilla, L.
6. Barbolla, J.
7. Mártil, I.
8. Redondo, E.
9. González-Díaz, G.