Influence of rapid thermal annealing processes on the properties of SiNx:H films deposited by the electron cyclotron resonance method

  1. Martínez, F.L.
  2. Mártil, I.
  3. González-Díaz, G.
  4. Selle, B.
  5. Sieber, I.
Journal:
Journal of Non-Crystalline Solids

ISSN: 0022-3093

Year of publication: 1998

Volume: 227-230

Issue: PART 1

Pages: 523-527

Type: Article

DOI: 10.1016/S0022-3093(98)00092-1 GOOGLE SCHOLAR
Data source: Scopus