Electrical properties of R.F.-sputtered SiO2 films

  1. Santamaría, J.
  2. Sánchez Quesada, F.
  3. Gonzalez Díaz, G.
  4. Iborra, E.
  5. Rodriguez Vidal, M.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 1985

Volume: 125

Issue: 3-4

Pages: 299-303

Type: Article

DOI: 10.1016/0040-6090(85)90236-6 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus