Influence of the sputtering gas pressure on deposition profiles
- Gras-Marti, A.
- Vallés-Abarca, J.A.
- González-Diaz, G.
- Mártil, I.
- Sanchez-Quesada, F.
- Rodriguez-Vidal, M.
ISSN: 1520-8559, 0734-2101
Year of publication: 1983
Volume: 1
Issue: 3
Pages: 1394-1397
Type: Article