Fabrication and characterisation of thin low-temperature MBE-compatible silicon oxides of different stoichiometry

  1. Strass, A.
  2. Bieringer, P.
  3. Hansch, W.
  4. Fuenzalida, V.
  5. Alvarez, A.
  6. Luna, J.
  7. Martil, I.
  8. Martinez, F.L.
  9. Eisele, I.
Revue:
Thin Solid Films

ISSN: 0040-6090

Année de publication: 1999

Volumen: 349

Número: 1-2

Pages: 135-146

Type: Article

DOI: 10.1016/S0040-6090(99)00166-2 GOOGLE SCHOLAR