Deuteron implantation into hexagonal silicon carbide: Defects and deuterium behaviour

  1. Shiryaev, A.
  2. Van Veen, A.
  3. Rivera, A.
  4. Van Huis, M.
  5. Bus, T.
  6. Arnoldbik, W.M.
  7. Tomozeiu, N.
  8. Habraken, F.H.P.M.
  9. Delamare, R.
  10. Ntsoenzok, E.
Journal:
EPJ Applied Physics

ISSN: 1286-0042

Year of publication: 2003

Volume: 23

Issue: 1

Pages: 11-18

Type: Article

DOI: 10.1051/EPJAP:2002116 GOOGLE SCHOLAR