Spectroscopic ellipsometry of non-absorbing films independent of film thickness

  1. Martínez-Antón, J.C.
  2. Gómez-Pedrero, J.A.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 2002

Volume: 193

Issue: 1-4

Pages: 268-276

Type: Article

DOI: 10.1016/S0169-4332(02)00494-4 GOOGLE SCHOLAR