High resolution two-dimensional zero reference marks design with optimization algorithms
- Saez-Landete, J.
- Alonso, J.
- Bernabeu, E.
Aktak:
EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology
Argitalpen urtea: 2005
Orrialdeak: 213-216
Mota: Biltzar ekarpena