High resolution two-dimensional zero reference marks design with optimization algorithms
- Saez-Landete, J.
- Alonso, J.
- Bernabeu, E.
Actes de conférence:
EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology
Année de publication: 2005
Pages: 213-216
Type: Communication dans un congrès