Extremely high-aspect-ratio ultrafast Bessel beam generation and stealth dicing of multi-millimeter thick glass

  1. Meyer, R.
  2. Froehly, L.
  3. Giust, R.
  4. Del Hoyo, J.
  5. Furfaro, L.
  6. Billet, C.
  7. Courvoisier, F.
Journal:
Applied Physics Letters

ISSN: 0003-6951

Year of publication: 2019

Volume: 114

Issue: 20

Type: Article

DOI: 10.1063/1.5096868 GOOGLE SCHOLAR