Extremely high-aspect-ratio ultrafast Bessel beam generation and stealth dicing of multi-millimeter thick glass

  1. Meyer, R.
  2. Froehly, L.
  3. Giust, R.
  4. Del Hoyo, J.
  5. Furfaro, L.
  6. Billet, C.
  7. Courvoisier, F.
Revue:
Applied Physics Letters

ISSN: 0003-6951

Année de publication: 2019

Volumen: 114

Número: 20

Type: Article

DOI: 10.1063/1.5096868 GOOGLE SCHOLAR