Experimental determination of residual stress in silicon nitride diffusion bonds obtained by high-energy X-ray diffraction
- Vila, M.
- Martínez, M.L.
- Prieto, C.
- Miranzo, P.
- Osendi, M.I.
- Terry, A.
- Vaughan, G.
ISSN: 0032-5910
Year of publication: 2004
Volume: 148
Issue: 1
Pages: 60-63
Type: Conference paper