Influence of the target and working gas on the composition of silicon nitride thin films prepared by reactive RF-sputtering
- Vila, M.
- Prieto, C.
- García-López, J.
- Respaldiza, M.A.
ISSN: 0168-583X
Argitalpen urtea: 2003
Alea: 211
Zenbakia: 2
Orrialdeak: 199-205
Mota: Artikulua