Influence of the target and working gas on the composition of silicon nitride thin films prepared by reactive RF-sputtering
- Vila, M.
- Prieto, C.
- García-López, J.
- Respaldiza, M.A.
ISSN: 0168-583X
Année de publication: 2003
Volumen: 211
Número: 2
Pages: 199-205
Type: Article