Line width dependent mobility in high-k - a comparative performance study between FUSI and TiN

  1. Pantisano, L.
  2. Trojman, L.
  3. Severi, S.
  4. San Andres, E.
  5. Kerner, C.
  6. Veloso, A.
  7. Ferain, I.
  8. Hoffman, T.
  9. Groeseneken, G.
  10. De Gendt, S.
Book:
2007 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATIONS (VLSI-TSA), PROCEEDINGS OF TECHNICAL PAPERS

ISBN: 978-1-4244-0584-8

Year of publication: 2007

Pages: 38-39

Congress: International Symposium on VLSI Technology, Systems and Applications

Type: Conference paper

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Data source: WoS