Control of the thickness distribution of evaporated functional electroceramic NTC thermistor thin films

  1. Schmidt, R.
  2. Parlak, M.
  3. Brinkman, A.W.
Revue:
Journal of Materials Processing Technology

ISSN: 0924-0136

Année de publication: 2008

Volumen: 199

Número: 1

Pages: 412-416

Type: Article

DOI: 10.1016/J.JMATPROTEC.2007.08.014 GOOGLE SCHOLAR