Publicaciones en colaboración con investigadores/as de Universidad Carlos III de Madrid (6)

2003

  1. Mechanical properties of sputtered silicon nitride thin films

    Journal of Applied Physics, Vol. 94, Núm. 12, pp. 7868-7873

2002

  1. Characterization of Si3N4 thin films prepared by r.f. magnetron sputtering

    Surface and Coatings Technology, Vol. 151-152, pp. 67-71