Química Inorgánica
Saila
Centro Nacional de Aceleradores
Sevilla, EspañaCentro Nacional de Aceleradores -ko ikertzaileekin lankidetzan egindako argitalpenak (2)
2003
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Influence of the target and working gas on the composition of silicon nitride thin films prepared by reactive RF-sputtering
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 211, Núm. 2, pp. 199-205