Publications en collaboration avec des chercheurs de Centro Nacional de Aceleradores (2)

2003

  1. Influence of the target and working gas on the composition of silicon nitride thin films prepared by reactive RF-sputtering

    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 211, Núm. 2, pp. 199-205

2002

  1. Compositional characterization of silicon nitride thin films prepared by RF-sputtering

    Vacuum