GdScO electrical results

  1. ENRIQUE SAN ANDRÉS SERRANO

Created date: 10-01-2023

Type: DATASET

Description

Electrical measurements of GdScO MIS capacitors with different metal gates and different annealing temperatures.

Related Documents

High-k gadolinium scandate on Si obtained by high pressure sputtering from metal targets and in-situ plasma oxidation

Type: Article

Related Projects

FABRICACIÓN DE DISPOSITIVOS DE EFECTO CAMPO CON DIELÉCTRICO DE ALTA PERMITIVIDAD SOBRE SI Y SEMICONDUCTORES III.

TEC2010-18051

Files

DATASET lock_openSerieN-GdScO.opj 720 KB