GdScO electrical results

  1. ENRIQUE SAN ANDRÉS SERRANO

Sortze-data: 10-01-2023

Mota: DATASET

Deskribapena

Electrical measurements of GdScO MIS capacitors with different metal gates and different annealing temperatures.

Lotura duten dokumentuak

High-k gadolinium scandate on Si obtained by high pressure sputtering from metal targets and in-situ plasma oxidation

Mota: Artikulua

Lotura duten proiektuak

FABRICACIÓN DE DISPOSITIVOS DE EFECTO CAMPO CON DIELÉCTRICO DE ALTA PERMITIVIDAD SOBRE SI Y SEMICONDUCTORES III.

TEC2010-18051

Artxibo

DATASET lock_openSerieN-GdScO.opj 720 KB