DRIE based technology for 3D silicon barcodes fabrication
- Gómez-Martínez, R.
- Sánchez, A.
- Duch, M.
- Esteve, J.
- Plaza, J.A.
ISSN: 0925-4005
Year of publication: 2011
Volume: 154
Issue: 2
Pages: 181-184
Type: Conference paper
ISSN: 0925-4005
Year of publication: 2011
Volume: 154
Issue: 2
Pages: 181-184
Type: Conference paper