Patterning of ALD HfO2 layers on silicon

  1. Andreu, R.
  2. Sánchez, J.
  3. Sánchez, A.
  4. Zabala, M.
  5. Acero, M.C.
  6. Rafi, J.M.
  7. Campabadal, F.
Proceedings:
ECS Transactions

ISSN: 1938-5862,  1938-6737

ISBN: 9781566777414

Year of publication: 2009

Volume: 25

Issue: 4

Pages: 309-314

Type: Conference paper

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Data source: Scopus