Electrical characterization of high-pressure reactive sputtered ScO x films on silicon

  1. Castán, H.
  2. Dueñas, S.
  3. Gómez, A.
  4. García, H.
  5. Bailón, L.
  6. Feijoo, P.C.
  7. Toledano-Luque, M.
  8. Del Prado, A.
  9. San Andrés, E.
  10. Lucía, M.L.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 2011

Volume: 519

Issue: 7

Pages: 2268-2272

Type: Article

DOI: 10.1016/J.TSF.2010.10.073 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus