Thermally induced modifications on bonding configuration and density of defects of plasma deposited SiO x:H films
- San Andrés, E.
- Del Prado, A.
- Mártil, I.
- González-Díaz, G.
- Bravo, D.
- López, F.J.
ISSN: 0021-8979
Year of publication: 2002
Volume: 92
Issue: 4
Pages: 1906-1913
Type: Article