Crystal damage assessment of Be+-implanted GaN by UV Raman scattering

  1. Pastor, D.
  2. Ibá̃ez, J.
  3. Cuscó, R.
  4. Artús, L.
  5. Gonzílez-Díaz, G.
  6. Calleja, E.
Aldizkaria:
Semiconductor Science and Technology

ISSN: 0268-1242 1361-6641

Argitalpen urtea: 2007

Alea: 22

Zenbakia: 2

Orrialdeak: 70-73

Mota: Artikulua

DOI: 10.1088/0268-1242/22/2/012 GOOGLE SCHOLAR