Crystal damage assessment of Be+-implanted GaN by UV Raman scattering

  1. Pastor, D.
  2. Ibá̃ez, J.
  3. Cuscó, R.
  4. Artús, L.
  5. Gonzílez-Díaz, G.
  6. Calleja, E.
Revue:
Semiconductor Science and Technology

ISSN: 0268-1242,  1361-6641

Année de publication: 2007

Volumen: 22

Número: 2

Pages: 70-73

Type: Article

DOI: 10.1088/0268-1242/22/2/012 GOOGLE SCHOLAR
La source de données: Scopus