Emission line intensities in an r.f. sputtering glow discharge system
ISSN: 0040-6090
Year of publication: 1993
Volume: 228
Issue: 1-2
Pages: 133-136
Type: Article
ISSN: 0040-6090
Year of publication: 1993
Volume: 228
Issue: 1-2
Pages: 133-136
Type: Article