Sputtering of SiO2 in O2Ar atmospheres
- Santamaría, J.
- Iborra, E.
- Sánchez Quesada, F.
- González Díaz, G.
- Rodríguez Vidal, M.
ISSN: 0040-6090
Year of publication: 1986
Volume: 139
Issue: 2
Pages: 201-208
Type: Article
ISSN: 0040-6090
Year of publication: 1986
Volume: 139
Issue: 2
Pages: 201-208
Type: Article