Defocus grating systems for optical alignment

  1. Chang, M.
  2. Sánchez, D.
  3. Montes, D.
  4. Vidarte, Z.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

Year of publication: 2004

Volume: 5491

Issue: PART 2

Pages: 1043-1049

Type: Conference paper

DOI: 10.1117/12.552023 GOOGLE SCHOLAR
Data source: Scopus