The behaviour of deuterium incorporated into the buried oxide of SIMOX

  1. Rivera, A.
  2. Van Veen, A.
  3. Schut, H.
  4. De Nijs, J.M.M.
  5. Balk, P.
  6. Alkemade, P.F.A.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 2001

Volume: 178

Issue: 1-4

Pages: 287-290

Type: Conference paper

DOI: 10.1016/S0168-583X(00)00484-5 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus