The behaviour of deuterium incorporated into the buried oxide of SIMOX

  1. Rivera, A.
  2. Van Veen, A.
  3. Schut, H.
  4. De Nijs, J.M.M.
  5. Balk, P.
  6. Alkemade, P.F.A.
Revue:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Année de publication: 2001

Volumen: 178

Número: 1-4

Pages: 287-290

Type: Communication dans un congrès

DOI: 10.1016/S0168-583X(00)00484-5 GOOGLE SCHOLAR

Objetivos de desarrollo sostenible

La source de données: Scopus