Removal of vacancy type clusters by low energy ion generated self-interstitials in crystalline silicon

  1. Fedorov, A.V.
  2. Van Veen, A.
  3. Schut, H.
  4. Rivera, A.
Aldizkaria:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Argitalpen urtea: 1999

Alea: 148

Zenbakia: 1-4

Orrialdeak: 289-293

Mota: Artikulua

DOI: 10.1016/S0168-583X(98)00852-0 GOOGLE SCHOLAR

Garapen Iraunkorreko Helburuak

Datuen iturria: Scopus