Removal of vacancy type clusters by low energy ion generated self-interstitials in crystalline silicon
- Fedorov, A.V.
- Van Veen, A.
- Schut, H.
- Rivera, A.
ISSN: 0168-583X
Année de publication: 1999
Volumen: 148
Número: 1-4
Pages: 289-293
Type: Article