High resolution two-dimensional zero reference marks design with optimization algorithms

  1. Saez-Landete, J.
  2. Alonso, J.
  3. Bernabeu, E.
Actas:
EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology

Año de publicación: 2005

Páginas: 213-216

Tipo: Aportación congreso