High resolution two-dimensional zero reference marks design with optimization algorithms
- Saez-Landete, J.
- Alonso, J.
- Bernabeu, E.
Actas:
EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology
Año de publicación: 2005
Páginas: 213-216
Tipo: Aportación congreso