Effect of sputtering rate and ion irradiation on the microstructure and magnetic properties of Ni Si3 N4 multilayers
- Vila, M.
- Prieto, C.
- Traverse, A.
- Ramírez, R.
Journal:
Journal of Applied Physics
ISSN: 0021-8979
Year of publication: 2005
Volume: 98
Issue: 11
Type: Article