Deep UV laser induced periodic surface structures on silicon formed by self-organization of nanoparticles
- Zazo, R.
- Solis, J.
- Sanchez-Gil, J.A.
- Ariza, R.
- Serna, R.
- Siegel, J.
Revista:
Applied Surface Science
ISSN: 0169-4332
Any de publicació: 2020
Volum: 520
Tipus: Article