Deep UV laser induced periodic surface structures on silicon formed by self-organization of nanoparticles
- Zazo, R.
- Solis, J.
- Sanchez-Gil, J.A.
- Ariza, R.
- Serna, R.
- Siegel, J.
Zeitschrift:
Applied Surface Science
ISSN: 0169-4332
Datum der Publikation: 2020
Ausgabe: 520
Art: Artikel