Deep UV laser induced periodic surface structures on silicon formed by self-organization of nanoparticles

  1. Zazo, R.
  2. Solis, J.
  3. Sanchez-Gil, J.A.
  4. Ariza, R.
  5. Serna, R.
  6. Siegel, J.
Revue:
Applied Surface Science

ISSN: 0169-4332

Année de publication: 2020

Volumen: 520

Type: Article

DOI: 10.1016/J.APSUSC.2020.146307 GOOGLE SCHOLAR
La source de données: Scopus