Deep UV laser induced periodic surface structures on silicon formed by self-organization of nanoparticles

  1. Zazo, R.
  2. Solis, J.
  3. Sanchez-Gil, J.A.
  4. Ariza, R.
  5. Serna, R.
  6. Siegel, J.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 2020

Volume: 520

Type: Article

DOI: 10.1016/J.APSUSC.2020.146307 GOOGLE SCHOLAR
Data source: Scopus