Publikationen in Zusammenarbeit mit Forschern von University of Massachusetts Amherst (5)

2004

  1. Deposition of gold films and nanostructures from supercritical carbon dioxide

    Chemistry of Materials, Vol. 16, Núm. 10, pp. 2028-2033

2003

  1. Alcohol-assisted deposition of copper films from supercritical carbon dioxide

    Chemistry of Materials, Vol. 15, Núm. 15, pp. 2910-2916

2002

  1. Deposition of Cu films from supercritical fluids using Cu(I) β-diketonate precursors

    Microelectronic Engineering

2001

  1. Deposition of conformal copper and nickel films from supercritical carbon dioxide

    Science, Vol. 294, Núm. 5540, pp. 141-145

  2. Reactive deposition of device quality conformal copper films from supercritical CO2

    Advanced Metallization Conference (AMC)