Publicaciones en colaboración con investigadores/as de University of Massachusetts Amherst (5)

2004

  1. Deposition of gold films and nanostructures from supercritical carbon dioxide

    Chemistry of Materials, Vol. 16, Núm. 10, pp. 2028-2033

2003

  1. Alcohol-assisted deposition of copper films from supercritical carbon dioxide

    Chemistry of Materials, Vol. 15, Núm. 15, pp. 2910-2916

2002

  1. Deposition of Cu films from supercritical fluids using Cu(I) β-diketonate precursors

    Microelectronic Engineering

2001

  1. Deposition of conformal copper and nickel films from supercritical carbon dioxide

    Science, Vol. 294, Núm. 5540, pp. 141-145

  2. Reactive deposition of device quality conformal copper films from supercritical CO2

    Advanced Metallization Conference (AMC)