Estructura de la Materia, Física Térmica y Electrónica
Departamento
Instituto de Catálisis y Petroleoquímica
Madrid, EspañaPublicaciones en colaboración con investigadores/as de Instituto de Catálisis y Petroleoquímica (4)
2017
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High-k gadolinium scandate on Si obtained by high pressure sputtering from metal targets and in-situ plasma oxidation
Semiconductor Science and Technology, Vol. 32, Núm. 3
2015
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Nano-laminate vs. direct deposition of high permittivity gadolinium scandate on silicon by high pressure sputtering
Thin Solid Films, Vol. 593, pp. 62-66
2013
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Gadolinium scandate by high-pressure sputtering for future generations of high-κ dielectrics
Semiconductor Science and Technology, Vol. 28, Núm. 8
2011
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Electrical and chemical characterization of high pressure sputtered scandium oxide for memory applications
Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011