Publicaciones en colaboración con investigadores/as de Centro Nacional de Aceleradores (2)

2003

  1. Influence of the target and working gas on the composition of silicon nitride thin films prepared by reactive RF-sputtering

    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 211, Núm. 2, pp. 199-205

2002

  1. Compositional characterization of silicon nitride thin films prepared by RF-sputtering

    Vacuum