Compositional analysis of thin SiO xN y:H films by heavy-ion ERDA, standard RBS, EDX and AES: A comparison

  1. Bohne, W.
  2. Röhrich, J.
  3. Schöpke, A.
  4. Selle, B.
  5. Sieber, I.
  6. Fuhs, W.
  7. Del Prado, Á.
  8. San Andrés, E.
  9. Mártil, I.
  10. González-Díaz, G.
Revista:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Any de publicació: 2004

Volum: 217

Número: 2

Pàgines: 237-245

Tipus: Article

DOI: 10.1016/J.NIMB.2003.11.003 GOOGLE SCHOLAR
Font de les dades: Scopus