Compositional analysis of thin SiO xN y:H films by heavy-ion ERDA, standard RBS, EDX and AES: A comparison

  1. Bohne, W.
  2. Röhrich, J.
  3. Schöpke, A.
  4. Selle, B.
  5. Sieber, I.
  6. Fuhs, W.
  7. Del Prado, Á.
  8. San Andrés, E.
  9. Mártil, I.
  10. González-Díaz, G.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 2004

Volume: 217

Issue: 2

Pages: 237-245

Type: Article

DOI: 10.1016/J.NIMB.2003.11.003 GOOGLE SCHOLAR
Data source: Scopus