Compositional analysis of thin SiO xN y:H films by heavy-ion ERDA, standard RBS, EDX and AES: A comparison

  1. Bohne, W.
  2. Röhrich, J.
  3. Schöpke, A.
  4. Selle, B.
  5. Sieber, I.
  6. Fuhs, W.
  7. Del Prado, Á.
  8. San Andrés, E.
  9. Mártil, I.
  10. González-Díaz, G.
Revista:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Ano de publicación: 2004

Volume: 217

Número: 2

Páxinas: 237-245

Tipo: Artigo

DOI: 10.1016/J.NIMB.2003.11.003 GOOGLE SCHOLAR
Fonte de datos: Scopus