Compositional analysis of thin SiO xN y:H films by heavy-ion ERDA, standard RBS, EDX and AES: A comparison

  1. Bohne, W.
  2. Röhrich, J.
  3. Schöpke, A.
  4. Selle, B.
  5. Sieber, I.
  6. Fuhs, W.
  7. Del Prado, Á.
  8. San Andrés, E.
  9. Mártil, I.
  10. González-Díaz, G.
Aldizkaria:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Argitalpen urtea: 2004

Alea: 217

Zenbakia: 2

Orrialdeak: 237-245

Mota: Artikulua

DOI: 10.1016/J.NIMB.2003.11.003 GOOGLE SCHOLAR
Datuen iturria: Scopus